1D mirror has two operation modes: resonant scanning and quasi-static scanning. The resonant scanning can achieve a mechanical deflection angle larger than ¡À15¡ã, while the quasi-static scanning can reach ¡À6.5¡ã mechanical angle. The micro mirror, coated with aluminum or gold, has a mirror size of 2.5~3mm and has good reflectivity for different wavelengths from visible light to infrared light. This series of chips can be applied to 3D face identification, LiDAR, medical imaging, laser printing, etc.
Multi-Size Chips
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