Micro-Austrian microarray chips are divided into two types: one-dimensional linear array and two-dimensional matrix. The developed one-dimensional linear array micromirror includes 1*20 WSS wavelength selector switch, and the two-dimensional micro-mirror matrix includes 8*8 and 20*20 large array optical cross-connection (OXC) chips. Its low driving voltage is 10V, and the chip deflection angle can reach <10 degrees.