This series of chips has two operation modes: resonant scanning and quasi-static scanning. The quasi-static mode can achieve mechanical defelction angle of 0 to ¡À1~¡À6¡ã. The micro mirror, coated with aluminum or gold, has a mirror size of 0.3~3mm and has good reflectivity for visible light. This series of chips can be used in the areas of biaxial optical switches, LiDAR, medical imaging, etc.
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