The chips have two working modes: resonance scanning and quasi-static deflection. The quasi-static mode can achieve mechanical deflection at different angles of 0-1-6 degrees. The size of the mirror is 0.3-3 mm, and the surface is aluminized. It has good reflectivity to visible light source. This series of chips can be used in Biaxial optical switch, LiDAR, Medical imaging and other fields.
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